DocumentCode
3619452
Title
A Consistent Parameter Extraction Method for Deep Submicron MOSFETs
Author
P. Klein
Author_Institution
Siemens AG, Germany
fYear
1997
fDate
6/19/1905 12:00:00 AM
Firstpage
664
Lastpage
667
Keywords
"Parameter extraction","MOSFETs","Capacitance","Voltage","Length measurement","Electrical resistance measurement","Capacitance-voltage characteristics","Immune system","Implants","Circuits"
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference, 1997. Proceeding of the 27th European
Print_ISBN
2-86332-221-4
Type
conf
DOI
10.1109/ESSDERC.1997.194516
Filename
1503446
Link To Document