• DocumentCode
    3619452
  • Title

    A Consistent Parameter Extraction Method for Deep Submicron MOSFETs

  • Author

    P. Klein

  • Author_Institution
    Siemens AG, Germany
  • fYear
    1997
  • fDate
    6/19/1905 12:00:00 AM
  • Firstpage
    664
  • Lastpage
    667
  • Keywords
    "Parameter extraction","MOSFETs","Capacitance","Voltage","Length measurement","Electrical resistance measurement","Capacitance-voltage characteristics","Immune system","Implants","Circuits"
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Device Research Conference, 1997. Proceeding of the 27th European
  • Print_ISBN
    2-86332-221-4
  • Type

    conf

  • DOI
    10.1109/ESSDERC.1997.194516
  • Filename
    1503446