• DocumentCode
    3619456
  • Title

    Piezoresistive bridge configuration for atomic force microscopy

  • Author

    R. Jumpertz;A. van der Hart;J. Schelten;O. Ohlsson;Th. Sulzbach;F. Saurenbach

  • Author_Institution
    Forschungszentrum J¨
  • fYear
    1997
  • fDate
    6/19/1905 12:00:00 AM
  • Firstpage
    680
  • Lastpage
    683
  • Keywords
    "Atomic force microscopy","Piezoresistance","Bridges","Resistors","Surface topography","Semiconductor device noise","Force sensors","Nanobioscience","Geometry","Thermal stresses"
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Device Research Conference, 1997. Proceeding of the 27th European
  • Print_ISBN
    2-86332-221-4
  • Type

    conf

  • DOI
    10.1109/ESSDERC.1997.194520
  • Filename
    1503450
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3619456