DocumentCode
3619457
Title
A novel gas sensor for hydrocarbons detection based on porous silicon permeated with Sn-V mixed oxides
Author
R. Angelucci;A. Poggi;C. Critelli;L. Dori;F. Cavani;A. Parisini;A. Garulli;G.C. Cardinali;M. Fiorini
Author_Institution
CNR LAMEL, Italy
fYear
1997
fDate
6/19/1905 12:00:00 AM
Firstpage
684
Lastpage
687
Keywords
"Gas detectors","Hydrocarbons","Substrates","Grain size","Sensor arrays","Crystallization","Chemical industry","Tin","Silicon devices","Gases"
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference, 1997. Proceeding of the 27th European
Print_ISBN
2-86332-221-4
Type
conf
DOI
10.1109/ESSDERC.1997.194521
Filename
1503451
Link To Document