DocumentCode :
3619473
Title :
Patterning of Pt/RuO2 electrodes for Pb(Zr,Ti)O3 in an Inductively Coupled Cl2/O2 Plasma
Author :
S.-G. Park;J.G. Lee;H.S. Jung;M.-S. Jeon;D.-K. Choi
Author_Institution :
Inha University, Korea
fYear :
1997
fDate :
6/19/1905 12:00:00 AM
Firstpage :
748
Lastpage :
751
Keywords :
"Electrodes","Leakage current","Plasma applications","Radio frequency","Plasma materials processing","Capacitors","Semiconductor films","Dry etching","Sputtering","Plasma properties"
Publisher :
ieee
Conference_Titel :
Solid-State Device Research Conference, 1997. Proceeding of the 27th European
Print_ISBN :
2-86332-221-4
Type :
conf
DOI :
10.1109/ESSDERC.1997.194537
Filename :
1503467
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3619473
