مرکز منطقه ای اطلاع رساني علوم و فناوري - Electrochemical Membrane Actuation with Piezoresistive Position Control

DocumentCode :

3619490

Title :

Electrochemical Membrane Actuation with Piezoresistive Position Control

Author :

A. Gotz;C. Cane

Author_Institution :

Centro Nacional de Microelectronica, Bellaterra, Barcelona, Spain

fYear :

1998

fDate :

6/20/1905 12:00:00 AM

Firstpage :

576

Lastpage :

579

Keywords :

"Biomembranes","Piezoresistance","Position control","Silicon","Electrodes","Bridge circuits","Piezoresistive devices","Actuators","Hydrogen","Nickel"

Publisher :

ieee

Conference_Titel :

Solid-State Device Research Conference, 1998. Proceeding of the 28th European

Print_ISBN :

2-86332-234-6

Type :

conf

Filename :

1503617

Link To Document :