3619495

Chip Size Optically Controlled 12kV Switch on Silicon

U. Hilleringmann;V. Mankowski;K. Goser

University of Dortmund, Germany

1998

6/20/1905 12:00:00 AM

596

599

"Optical control","Size control","Optical switches","Silicon","Insulation","Breakdown voltage","Etching","RNA","Light emitting diodes","Charge carriers"

ieee

Solid-State Device Research Conference, 1998. Proceeding of the 28th European

2-86332-234-6

conf

1503622