• DocumentCode
    3619507
  • Title

    A New Method and Test Structure for Determination of Interconnect Parasitic Parameters

  • Author

    C.-J. Chao;S.-C. Wong;M.-J. Chen;B.-K. Liew

  • Author_Institution
    National Chiao-Tung University, Hsinchu, Taiwan
  • fYear
    1998
  • fDate
    6/20/1905 12:00:00 AM
  • Firstpage
    644
  • Lastpage
    647
  • Keywords
    "Testing","Integrated circuit interconnections","Wire","Parasitic capacitance","Electrical resistance measurement","Capacitance measurement","Dielectric measurements","Velocity measurement","Ring oscillators","Thickness measurement"
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Device Research Conference, 1998. Proceeding of the 28th European
  • Print_ISBN
    2-86332-234-6
  • Type

    conf

  • Filename
    1503634
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3619507