3619520

Water-Assisted Positive Ion Contamination Resulting in Charge Loss in Nonvolatile Memories

P. Gassot;A. Iline;E. De Backer;M. Tack;D. Wellekens;J. Van Houdt;L. Haspeslagh

Alcatel Microelectronics, Oudenaarde, Belgium

2000

6/22/1905 12:00:00 AM

268

271

"Contamination","Nonvolatile memory","Silicon compounds","Passivation","CMOS technology","Threshold voltage","Temperature","CMOS process","Tin","Microelectronics"

ieee

Solid-State Device Research Conference, 2000. Proceeding of the 30th European

2-86332-248-6

conf

10.1109/ESSDERC.2000.194766

1503696