DocumentCode
3619563
Title
Effects of Boron and Germanium Base Profiles on SiGe and SiGe:C BJT Characteristics
Author
A. Sadovnikov;C. Printy;T. Budri;R. Loo;P. Meunier-Beillard;M. El-Diwany
Author_Institution
National Semiconductor Corp., Santa Clara, CA, USA
fYear
2002
fDate
6/24/1905 12:00:00 AM
Firstpage
611
Lastpage
614
Keywords
"Boron","Silicon germanium","Germanium silicon alloys","Temperature","Carbon dioxide","Linearity","Tunneling","Radio frequency","Epitaxial growth","Doping profiles"
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference, 2002. Proceeding of the 32nd European
Print_ISBN
88-900847-8-2
Type
conf
DOI
10.1109/ESSDERC.2002.195005
Filename
1503935
Link To Document