Title :
Integrated polymeric Mach Zehnder interferometer for biosensing applications
Author :
R. Muller;D. Esinenco;M. Kusko;P. Obreja;E. Manea;O. Ligor;D. Apostol;V. Damian;M. Mateescu;L. Moldovan;L. Tcacenco;S.D. Psoma;A. Schneider;E. Huq
fDate :
6/27/1905 12:00:00 AM
Abstract :
A relatively new and simple way to realize integrated optical waveguides is to use polymeric materials. We propose an integrated optical biosensor based on negative photoresist SU-8 and positive photoresist. A Mach-Zehnder architecture was chosen for the sensor. Design, simulations, using Opti-FDTD software tools and preliminary fabrication experiments were presented.
Keywords :
"Biosensors","Optical interferometry","Optical polymers","Biomedical optical imaging","Integrated optics","Optical sensors","Optical waveguides","Resists","Application software","Biological materials"
Conference_Titel :
Semiconductor Conference, 2005. CAS 2005 Proceedings. 2005 International
Print_ISBN :
0-7803-9214-0
DOI :
10.1109/SMICND.2005.1558754
