DocumentCode :
3621153
Title :
Piezoelectric micro-machined ultrasonic transducer (pMUT) for energy harvesting
Author :
K. Dogheche;B. Cavallier;P. Delobelle;L. Hirsinger;S. Ballandras;E. Cattan;D. Remiens;M. Marzencki;B. Charlot;S. Basrour
Volume :
2
fYear :
2005
fDate :
6/27/1905 12:00:00 AM
Firstpage :
939
Lastpage :
942
Keywords :
"Ultrasonic transducers","Biomembranes","Ultrasonic imaging","Silicon","Residual stresses","Thermal stresses","Fabrication","Power generation","Piezoelectric films","Chemical lasers"
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 2005 IEEE
ISSN :
1051-0117
Print_ISBN :
0-7803-9382-1
Type :
conf
DOI :
10.1109/ULTSYM.2005.1603005
Filename :
1603005
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3621153
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