مرکز منطقه ای اطلاع رساني علوم و فناوري - Calotte PZT thin film structures for micromechanics

DocumentCode :

3621187

Title :

Calotte PZT thin film structures for micromechanics

Author :

F. Calame;P. Muralt

Volume :

fYear :

2005

fDate :

6/27/1905 12:00:00 AM

Firstpage :

1087

Lastpage :

1090

Keywords :

"Transistors","Piezoelectric films","Substrates","Silicon","Micromechanical devices","Sputtering","Resists","Coatings","Fabrication","Wet etching"

Publisher :

ieee

Conference_Titel :

Ultrasonics Symposium, 2005 IEEE

ISSN :

1051-0117

Print_ISBN :

0-7803-9382-1

Type :

conf

DOI :

10.1109/ULTSYM.2005.1603039

Filename :

1603039

Link To Document :