• DocumentCode
    3621203
  • Title

    A micromachined ultrasonic atomizer based on a liquid horn structure

  • Author

    J.M. Meacham;M.J. Varady;A.G. Fedorov;F.L. Degertekin

  • Volume
    2
  • fYear
    2005
  • fDate
    6/27/1905 12:00:00 AM
  • Firstpage
    1155
  • Lastpage
    1159
  • Keywords
    "Silicon","Acoustic waves","Focusing","Dry etching","Wet etching","US Department of Defense","Fabrication","Piezoelectric transducers","Reservoirs","Plasma applications"
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2005 IEEE
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-9382-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2005.1603055
  • Filename
    1603055
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3621203