• DocumentCode
    3621204
  • Title

    An ultrasonic MEMS particle separator with thick film piezoelectric actuation

  • Author

    M. Hill;R.J. Townsend;N.R. Harris;N.M. White;S.P. Beeby; Jiexiong Ding

  • Volume
    2
  • fYear
    2005
  • fDate
    6/27/1905 12:00:00 AM
  • Firstpage
    1160
  • Lastpage
    1163
  • Keywords
    "Micromechanical devices","Particle separators","Thick films","Silicon","Acoustic waves","Piezoelectric materials","Actuators","Acoustic devices","Microfluidics","Fabrication"
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2005 IEEE
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-9382-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2005.1603056
  • Filename
    1603056
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3621204