3621204

An ultrasonic MEMS particle separator with thick film piezoelectric actuation

M. Hill;R.J. Townsend;N.R. Harris;N.M. White;S.P. Beeby; Jiexiong Ding

2

2005

6/27/1905 12:00:00 AM

1160

1163

"Micromechanical devices","Particle separators","Thick films","Silicon","Acoustic waves","Piezoelectric materials","Actuators","Acoustic devices","Microfluidics","Fabrication"

ieee

Ultrasonics Symposium, 2005 IEEE

1051-0117

0-7803-9382-1

conf

10.1109/ULTSYM.2005.1603056

1603056