• DocumentCode
    3621207
  • Title

    Bulk detection of sound waves launched by surface micromachined beam resonators

  • Author

    S. Ardanuc;A. Lal

  • Volume
    2
  • fYear
    2005
  • fDate
    6/27/1905 12:00:00 AM
  • Firstpage
    1171
  • Lastpage
    1174
  • Keywords
    "Surface waves","Acoustic beams","Electrostatic actuators","Ceramics","Silicon","Acoustical engineering","Optical coupling","Bonding","Resonant frequency","Assembly"
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2005 IEEE
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-9382-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2005.1603059
  • Filename
    1603059
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3621207