DocumentCode :
3621208
Title :
Optimization of acoustic dispersion for high performance thin film BAW resonators
Author :
G.G. Fattinger;S. Marksteiner;J. Kaitila;R. Aigner
Volume :
2
fYear :
2005
fDate :
6/27/1905 12:00:00 AM
Firstpage :
1175
Lastpage :
1178
Keywords :
"Transistors","Resonance","Resonant frequency","Cutoff frequency","Acoustic devices","Zinc oxide","Shape","Boundary conditions","Pistons","Metallization"
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 2005 IEEE
ISSN :
1051-0117
Print_ISBN :
0-7803-9382-1
Type :
conf
DOI :
10.1109/ULTSYM.2005.1603060
Filename :
1603060
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3621208
