DocumentCode :
3621209
Title :
Suppression of spurious modes in mirror-type thin film BAW resonators using an appropriate shape of the active area
Author :
A. Link;E. Schmidhammer;H. Heinze;M. Mayer;M. Schmiedgen;B. Bader;K. Wagner;R. Weigel
Volume :
2
fYear :
2005
fDate :
6/27/1905 12:00:00 AM
Firstpage :
1179
Lastpage :
1182
Keywords :
"Transistors","Shape","Film bulk acoustic resonators","Resonator filters","Electrodes","Band pass filters","Sputtering","Zinc oxide","Insertion loss","Passband"
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 2005 IEEE
ISSN :
1051-0117
Print_ISBN :
0-7803-9382-1
Type :
conf
DOI :
10.1109/ULTSYM.2005.1603061
Filename :
1603061
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3621209
