• DocumentCode
    3621210
  • Title

    Simulation and experimental measurements of high-overtoned bulk acoustic resonators (H-BAR)

  • Author

    S. Alzuaga;J.M. Friedt;S. Ballandras;J. Masson;L. Robert;N. Bazin;B. Guichardaz;D. Gachon

  • Volume
    2
  • fYear
    2005
  • fDate
    6/27/1905 12:00:00 AM
  • Firstpage
    1183
  • Lastpage
    1186
  • Keywords
    "Acoustic measurements","Substrates","Resonator filters","Film bulk acoustic resonators","Resonance","Piezoelectric films","Resonant frequency","Acoustic devices","Aluminum nitride","Q factor"
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2005 IEEE
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-9382-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2005.1603062
  • Filename
    1603062
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3621210