• DocumentCode
    3621211
  • Title

    Single-chip multiple-frequency RF microresonators based on aluminum nitride contour-mode and FBAR technologies

  • Author

    G. Piazza;P.J. Stephanou;J.P. Black;R.M. White;A.P. Pisano

  • Volume
    2
  • fYear
    2005
  • fDate
    6/27/1905 12:00:00 AM
  • Firstpage
    1187
  • Lastpage
    1190
  • Keywords
    "Radio frequency","Microcavities","Aluminum nitride","Film bulk acoustic resonators","Resonator filters","Acoustic waves","Insertion loss","Oscillators","Shape","Thin film sensors"
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2005 IEEE
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-9382-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2005.1603063
  • Filename
    1603063
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3621211