مرکز منطقه ای اطلاع رساني علوم و فناوري - AlN thin film resonators operating at 8 GHz used as sensors for organic films

DocumentCode :

3621227

Title :

AlN thin film resonators operating at 8 GHz used as sensors for organic films

Author :

S. Rey-Mermet;R. Lanz;P. Muralt

Volume :

fYear :

2005

fDate :

6/27/1905 12:00:00 AM

Firstpage :

1253

Lastpage :

1257

Keywords :

"Thin film sensors","Electrodes","Polymer films","Aluminum","Acoustic waves","Impedance","Resonant frequency","Testing","Ceramics","Laboratories"

Publisher :

ieee

Conference_Titel :

Ultrasonics Symposium, 2005 IEEE

ISSN :

1051-0117

Print_ISBN :

0-7803-9382-1

Type :

conf

DOI :

10.1109/ULTSYM.2005.1603079

Filename :

1603079

Link To Document :