• DocumentCode
    3621228
  • Title

    Sensor for ambient pressure and material strains using a thin film bulk acoustic resonator

  • Author

    J. Weber;M. Link;R. Primig;D. Pitzer;M. Schreiter

  • Volume
    2
  • fYear
    2005
  • fDate
    6/27/1905 12:00:00 AM
  • Firstpage
    1258
  • Lastpage
    1261
  • Keywords
    "Thin film sensors","Acoustic sensors","Acoustic materials","Capacitive sensors","Film bulk acoustic resonators","Biomembranes","Stress","Acoustic measurements","Resonance","Resonant frequency"
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2005 IEEE
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-9382-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2005.1603080
  • Filename
    1603080
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3621228