DocumentCode :
3621228
Title :
Sensor for ambient pressure and material strains using a thin film bulk acoustic resonator
Author :
J. Weber;M. Link;R. Primig;D. Pitzer;M. Schreiter
Volume :
2
fYear :
2005
fDate :
6/27/1905 12:00:00 AM
Firstpage :
1258
Lastpage :
1261
Keywords :
"Thin film sensors","Acoustic sensors","Acoustic materials","Capacitive sensors","Film bulk acoustic resonators","Biomembranes","Stress","Acoustic measurements","Resonance","Resonant frequency"
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 2005 IEEE
ISSN :
1051-0117
Print_ISBN :
0-7803-9382-1
Type :
conf
DOI :
10.1109/ULTSYM.2005.1603080
Filename :
1603080
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3621228
