3621240

Nanoimprint lithography for RF SAW manufacture

Wen Liu

2

2005

6/27/1905 12:00:00 AM

1303

1306

"Nanolithography","Radio frequency","Surface acoustic waves","Resists","Optical surface waves","Substrates","Manufacturing industries","Semiconductor device manufacture","Integrated circuit technology","Nonhomogeneous media"

ieee

Ultrasonics Symposium, 2005 IEEE

1051-0117

0-7803-9382-1

conf

10.1109/ULTSYM.2005.1603092

1603092