• DocumentCode
    3621242
  • Title

    Temperature coefficient of elastic constants of sputtered TeO/sub 2/ thin film for zero TCD SAW devices

  • Author

    N. Dewan;M. Tomar;K. Sreenivas;V. Gupta

  • Volume
    2
  • fYear
    2005
  • fDate
    6/27/1905 12:00:00 AM
  • Firstpage
    1311
  • Lastpage
    1314
  • Keywords
    "Temperature","Sputtering","Thin film devices","Surface acoustic wave devices","Surface acoustic waves","Frequency","Filtering theory","Stability","Thickness measurement","Amorphous materials"
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2005 IEEE
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-9382-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2005.1603094
  • Filename
    1603094
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3621242