DocumentCode :
3621242
Title :
Temperature coefficient of elastic constants of sputtered TeO/sub 2/ thin film for zero TCD SAW devices
Author :
N. Dewan;M. Tomar;K. Sreenivas;V. Gupta
Volume :
2
fYear :
2005
fDate :
6/27/1905 12:00:00 AM
Firstpage :
1311
Lastpage :
1314
Keywords :
"Temperature","Sputtering","Thin film devices","Surface acoustic wave devices","Surface acoustic waves","Frequency","Filtering theory","Stability","Thickness measurement","Amorphous materials"
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 2005 IEEE
ISSN :
1051-0117
Print_ISBN :
0-7803-9382-1
Type :
conf
DOI :
10.1109/ULTSYM.2005.1603094
Filename :
1603094
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3621242
