DocumentCode :
3621277
Title :
Piezoelectric bimorph micro-cantilever: a new gas pressure sensor
Author :
V. Morteta;R. Petersen;K. Haenena;M. D´Olieslaegera
Volume :
3
fYear :
2005
fDate :
6/27/1905 12:00:00 AM
Firstpage :
1456
Lastpage :
1459
Keywords :
"Gas detectors","Resonant frequency","Temperature measurement","Pressure measurement","Damping","Sensor systems","Piezoelectric films","Resonance","Oscillators","Atomic force microscopy"
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 2005 IEEE
ISSN :
1051-0117
Print_ISBN :
0-7803-9382-1
Type :
conf
DOI :
10.1109/ULTSYM.2005.1603131
Filename :
1603131
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3621277
