3621288

Mechanical characterization of Ta and TaN diffusion barrier layers using laser acoustics

D.M. Profunser;J. Vollmann;J. Bryner;J. Dual

3

2005

6/27/1905 12:00:00 AM

1500

1503

"Acoustic pulses","Optical pulses","Scanning electron microscopy","Laser excitation","Transmission electron microscopy","Pump lasers","Copper","Transistors","Wavelength measurement","Metallization"

ieee

Ultrasonics Symposium, 2005 IEEE

1051-0117

0-7803-9382-1

conf

10.1109/ULTSYM.2005.1603142

1603142