DocumentCode :
3621308
Title :
Design and fabrication of thin film lamb wave resonators utilizing longitudinal wave and interdigital transducers
Author :
V. Yantchev;I. Katardjiev
Volume :
3
fYear :
2005
fDate :
6/27/1905 12:00:00 AM
Firstpage :
1580
Lastpage :
1583
Keywords :
"Fabrication","Transistors","Sputtering","Frequency","Biomembranes","Acoustic waves","Piezoelectric films","Piezoelectric transducers","Silicon","Resonance"
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 2005 IEEE
ISSN :
1051-0117
Print_ISBN :
0-7803-9382-1
Type :
conf
DOI :
10.1109/ULTSYM.2005.1603162
Filename :
1603162
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3621308
