DocumentCode :
3621312
Title :
Charge-biased vibrating micromechanical resonators
Author :
Sheng-Shian Li; Yu-Wei Lin; Yuan Xie; Zeying Ren;C.T.-C. Nguyen
Volume :
3
fYear :
2005
fDate :
6/27/1905 12:00:00 AM
Firstpage :
1596
Lastpage :
1599
Keywords :
"Micromechanical devices","Voltage","Resonance","Switches","Frequency","Power supplies","Electrodes","Capacitors","Resonator filters","Thermal stability"
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 2005 IEEE
ISSN :
1051-0117
Print_ISBN :
0-7803-9382-1
Type :
conf
DOI :
10.1109/ULTSYM.2005.1603166
Filename :
1603166
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3621312
