DocumentCode

3621312

Title

Charge-biased vibrating micromechanical resonators

Author

Sheng-Shian Li; Yu-Wei Lin; Yuan Xie; Zeying Ren;C.T.-C. Nguyen

Volume

3

fYear

2005

fDate

6/27/1905 12:00:00 AM

Firstpage

1596

Lastpage

1599

Keywords

"Micromechanical devices","Voltage","Resonance","Switches","Frequency","Power supplies","Electrodes","Capacitors","Resonator filters","Thermal stability"

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2005 IEEE

ISSN

1051-0117

Print_ISBN

0-7803-9382-1

Type

conf

DOI

10.1109/ULTSYM.2005.1603166

Filename

1603166