DocumentCode :
3621318
Title :
Modelling of ultrasonic wave propagation in integrated piezoelectric structures under residual stress
Author :
M. Lematre;G. Feuillard;T. Delaunay;M. Lethiecq
Volume :
3
fYear :
2005
fDate :
6/27/1905 12:00:00 AM
Firstpage :
1621
Lastpage :
1624
Keywords :
"Residual stresses","Piezoelectric films","Equations","Piezoelectric materials","Substrates","Thermal stresses","Piezoelectricity","Ceramics","Surface acoustic waves","Acoustic waves"
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 2005 IEEE
ISSN :
1051-0117
Print_ISBN :
0-7803-9382-1
Type :
conf
DOI :
10.1109/ULTSYM.2005.1603172
Filename :
1603172
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3621318
