• DocumentCode
    3621364
  • Title

    Assessment of the piezoelectric response of sputtered A1N films by x-ray diffraction

  • Author

    E. Iborra;A. Sanz-Hervas;M. Clement;L. Vergara;J. Olivares;J. Sangrador

  • Volume
    3
  • fYear
    2005
  • fDate
    6/27/1905 12:00:00 AM
  • Firstpage
    1808
  • Lastpage
    1811
  • Keywords
    "Piezoelectric films","X-ray diffraction","Sputtering","Crystallization","Reflection","Crystallography","X-ray scattering","Semiconductor films","Acoustic diffraction","Surface acoustic waves"
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2005 IEEE
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-9382-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2005.1603219
  • Filename
    1603219
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3621364