DocumentCode :
3621365
Title :
Resonant electromechanical device fabrication with new thin film materials
Author :
J. McPhillips;T.B. Adams;N.J. Donnelly;D. Cornez;S. Lapp;A. Abrar;J.M. Gregg;R.M. Bowman;G. McRobbie;K.J. Kirk;S. Cochran
Volume :
3
fYear :
2005
fDate :
6/27/1905 12:00:00 AM
Firstpage :
1812
Lastpage :
1815
Keywords :
"Resonance","Electromechanical devices","Fabrication","Thin film devices","Piezoelectric materials","Piezoelectric films","Sputtering","Crystalline materials","Pulsed laser deposition","Substrates"
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 2005 IEEE
ISSN :
1051-0117
Print_ISBN :
0-7803-9382-1
Type :
conf
DOI :
10.1109/ULTSYM.2005.1603220
Filename :
1603220
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3621365
