3621367

Effective electromechanical coupling coefficient and quality factor control by the layer arrangement of 1.8-GHhz range film bulk acoustic wave resonators composed of ZnO, SiO/sub 2/ and Al/sub 2/O/sub 3/ thin films

M. Takeuchi;H. Yamada;H. Kawamura;Y. Yoshino;T. Makino;S. Arai

3

2005

6/27/1905 12:00:00 AM

1820

1823

"Q factor","Film bulk acoustic resonators","Acoustic waves","Zinc oxide","Transistors","Biomembranes","Piezoelectric films","Impedance","Acoustic materials","Resonant frequency"

ieee

Ultrasonics Symposium, 2005 IEEE

1051-0117

0-7803-9382-1

conf

10.1109/ULTSYM.2005.1603222

1603222