DocumentCode :
3621368
Title :
Electromechanical coupling coefficient k15 of (1120) textured ZnO films
Author :
T. Yanagitani;N. Mishima;M. Matsukawa;Y. Watanabe
Volume :
3
fYear :
2005
fDate :
6/27/1905 12:00:00 AM
Firstpage :
1824
Lastpage :
1827
Keywords :
"Zinc oxide","Piezoelectric films","Film bulk acoustic resonators","Substrates","Crystallization","Electrodes","Glass","Radio frequency","Sputtering","Resonance"
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 2005 IEEE
ISSN :
1051-0117
Print_ISBN :
0-7803-9382-1
Type :
conf
DOI :
10.1109/ULTSYM.2005.1603223
Filename :
1603223
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3621368
