مرکز منطقه ای اطلاع رساني علوم و فناوري - Fabrication and evaluation of an "electrodeless" solidly mounted thin film electroacoustic resonator

DocumentCode :

3621371

Title :

Fabrication and evaluation of an "electrodeless" solidly mounted thin film electroacoustic resonator

Author :

J. Enlund;I. Katardjiev;D.M. Martin

Volume :

fYear :

2005

fDate :

6/27/1905 12:00:00 AM

Firstpage :

1837

Lastpage :

1839

Keywords :

"Fabrication","Transistors","Electrodes","Resonance","Acoustic devices","Substrates","Optical films","Acoustic waves","Aluminum nitride","Mirrors"

Publisher :

ieee

Conference_Titel :

Ultrasonics Symposium, 2005 IEEE

ISSN :

1051-0117

Print_ISBN :

0-7803-9382-1

Type :

conf

DOI :

10.1109/ULTSYM.2005.1603227

Filename :

1603227

Link To Document :