DocumentCode :
3621372
Title :
Design and fabrication of a surface micromachined frequency tunable film bulk acoustic resonator with an extended electrostatic tuning range
Author :
Wanling Pan;P. Soussan;B. Nauwelaers;H.A.C. Tilmans
Volume :
3
fYear :
2005
fDate :
6/27/1905 12:00:00 AM
Firstpage :
1840
Lastpage :
1843
Keywords :
"Fabrication","Film bulk acoustic resonators","Tuning","Capacitors","Electrodes","Resonant frequency","Electrostatic actuators","Tunable circuits and devices","Voltage","Circuit optimization"
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 2005 IEEE
ISSN :
1051-0117
Print_ISBN :
0-7803-9382-1
Type :
conf
DOI :
10.1109/ULTSYM.2005.1603228
Filename :
1603228
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3621372
