DocumentCode :
3621386
Title :
AlN-on-Si SAW filters: influence of film thickness, IDT geometry and substrate conductivity
Author :
M. Clement;L. Vergara;E. Iborra;A. Sanz-Hervas;J. Olivares;J. Sangrador
Volume :
4
fYear :
2005
fDate :
6/27/1905 12:00:00 AM
Firstpage :
1900
Lastpage :
1904
Keywords :
"SAW filters","Conductive films","Geometry","Substrates","Conductivity","Surface acoustic wave devices","Surface acoustic waves","Silicon","Frequency response","Circuits"
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 2005 IEEE
ISSN :
1051-0117
Print_ISBN :
0-7803-9382-1
Type :
conf
DOI :
10.1109/ULTSYM.2005.1603244
Filename :
1603244
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3621386
