• DocumentCode
    3621386
  • Title

    AlN-on-Si SAW filters: influence of film thickness, IDT geometry and substrate conductivity

  • Author

    M. Clement;L. Vergara;E. Iborra;A. Sanz-Hervas;J. Olivares;J. Sangrador

  • Volume
    4
  • fYear
    2005
  • fDate
    6/27/1905 12:00:00 AM
  • Firstpage
    1900
  • Lastpage
    1904
  • Keywords
    "SAW filters","Conductive films","Geometry","Substrates","Conductivity","Surface acoustic wave devices","Surface acoustic waves","Silicon","Frequency response","Circuits"
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2005 IEEE
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-9382-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2005.1603244
  • Filename
    1603244
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3621386