• DocumentCode
    3621397
  • Title

    Fabrication and characterization of a micro-machined ultrasonic transducer

  • Author

    Chenping Jia;M. Wiemer;N. Zichner;T. Otto;T. Gessner

  • Volume
    4
  • fYear
    2005
  • fDate
    6/27/1905 12:00:00 AM
  • Firstpage
    1945
  • Lastpage
    1947
  • Keywords
    "Fabrication","Ultrasonic transducers","Biomembranes","Wafer bonding","Silicon","Piezoelectric transducers","Etching","Resonance","Acoustic transducers","Geometry"
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2005 IEEE
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-9382-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2005.1603255
  • Filename
    1603255
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3621397