• DocumentCode
    3621398
  • Title

    Design, fabrication and characterisation of capacitive micro-machined ultrasonic transducers based on a 2d-like architecture

  • Author

    S. Clatot;P. Blind;V. Petrini;L. Gauthier-Manuel;M. Wilm;J.C. Jeannot;S. Ballandras;R. Berriet

  • Volume
    4
  • fYear
    2005
  • fDate
    6/27/1905 12:00:00 AM
  • Firstpage
    1948
  • Lastpage
    1951
  • Keywords
    "Fabrication","Ultrasonic transducers","Biomembranes","Silicon","Acoustic transducers","Resonance","Residual stresses","Ultrafast optics","Periodic structures","Finite element methods"
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2005 IEEE
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-9382-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2005.1603256
  • Filename
    1603256
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3621398