مرکز منطقه ای اطلاع رساني علوم و فناوري - Design, fabrication and characterisation of capacitive micro-machined ultrasonic transducers based on a 2d-like architecture

DocumentCode :

3621398

Title :

Design, fabrication and characterisation of capacitive micro-machined ultrasonic transducers based on a 2d-like architecture

Author :

S. Clatot;P. Blind;V. Petrini;L. Gauthier-Manuel;M. Wilm;J.C. Jeannot;S. Ballandras;R. Berriet

Volume :

fYear :

2005

fDate :

6/27/1905 12:00:00 AM

Firstpage :

1948

Lastpage :

1951

Keywords :

"Fabrication","Ultrasonic transducers","Biomembranes","Silicon","Acoustic transducers","Resonance","Residual stresses","Ultrafast optics","Periodic structures","Finite element methods"

Publisher :

ieee

Conference_Titel :

Ultrasonics Symposium, 2005 IEEE

ISSN :

1051-0117

Print_ISBN :

0-7803-9382-1

Type :

conf

DOI :

10.1109/ULTSYM.2005.1603256

Filename :

1603256

Link To Document :

https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3621398