3621440

Direct optical measurement of the Q values of RF-MEMS resonators

O. Holmgren;K. Kokkonen;V. Kaajakari;A. Oja;J.V. Knuuttila

4

2005

6/27/1905 12:00:00 AM

2112

2115

"Optical resonators","Q measurement","Radiofrequency microelectromechanical systems","Electric variables measurement","Optical interferometry","Acoustic measurements","Micromechanical devices","Oscillators","Vibrations","Laser modes"

ieee

Ultrasonics Symposium, 2005 IEEE

1051-0117

0-7803-9382-1

conf

10.1109/ULTSYM.2005.1603298

1603298