DocumentCode :
3621444
Title :
Thin-film composite resonators on crystalline substrates
Author :
A. Ballato
Volume :
4
fYear :
2005
fDate :
6/27/1905 12:00:00 AM
Firstpage :
2128
Lastpage :
2131
Keywords :
"Transistors","Crystallization","Substrates","Piezoelectric films","Frequency","Costs","Piezoelectric materials","Temperature","Acoustic waves","Tellurium"
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 2005 IEEE
ISSN :
1051-0117
Print_ISBN :
0-7803-9382-1
Type :
conf
DOI :
10.1109/ULTSYM.2005.1603302
Filename :
1603302
Link To Document :
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