مرکز منطقه ای اطلاع رساني علوم و فناوري

DocumentCode :

3621455

Title :

GHz frequency ZnO/Si SAW device

Author :

L. Le Brizoual;F. Sarry;O. Elmazria;P. Alnot;Th. Pastureaud;S. Ballandras;V. Laude

Volume :

fYear :

2005

fDate :

6/27/1905 12:00:00 AM

Firstpage :

2174

Lastpage :

2177

Keywords :

"Frequency","Zinc oxide","Surface acoustic wave devices","Piezoelectric films","Lithography","Dielectric substrates","Silicon","Sputtering","Piezoelectric transducers","Aluminum"

Publisher :

ieee

Conference_Titel :

Ultrasonics Symposium, 2005 IEEE

ISSN :

1051-0117

Print_ISBN :

0-7803-9382-1

Type :

conf

DOI :

10.1109/ULTSYM.2005.1603313

Filename :

1603313

Link To Document :

https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3621455