DocumentCode
3621530
Title
Integrated circuits and manufacturing advanced cmos and platform technology
Author
Shih-Fen Huang; Yee-Chaung See
fYear
2005
fDate
6/27/1905 12:00:00 AM
Firstpage
47
Lastpage
47
Keywords
"CMOS technology","CMOS integrated circuits","Integrated circuit manufacture","Integrated circuit technology","Paper technology","Art","CMOS logic circuits","Lithography","Capacitive sensors","Power engineering and energy"
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 2005. IEDM Technical Digest. IEEE International
Print_ISBN
0-7803-9268-X
Type
conf
DOI
10.1109/IEDM.2005.1609262
Filename
1609262
Link To Document