• DocumentCode
    3621541
  • Title

    Process technology advanced integration concepts

  • Author

    S. Deleonibus;S. Tyagi

  • fYear
    2005
  • fDate
    6/27/1905 12:00:00 AM
  • Firstpage
    335
  • Lastpage
    335
  • Keywords
    "Random access memory","Integrated circuit technology","Isolation technology","Paper technology","Self-assembly","Fabrication","Capacitors","Ferroelectric films","Nonvolatile memory","Flash memory"
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 2005. IEDM Technical Digest. IEEE International
  • Print_ISBN
    0-7803-9268-X
  • Type

    conf

  • DOI
    10.1109/IEDM.2005.1609343
  • Filename
    1609343
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3621541