3621541

Process technology advanced integration concepts

S. Deleonibus;S. Tyagi

2005

6/27/1905 12:00:00 AM

335

335

"Random access memory","Integrated circuit technology","Isolation technology","Paper technology","Self-assembly","Fabrication","Capacitors","Ferroelectric films","Nonvolatile memory","Flash memory"

ieee

Electron Devices Meeting, 2005. IEDM Technical Digest. IEEE International

0-7803-9268-X

conf

10.1109/IEDM.2005.1609343

1609343