• DocumentCode
    3621548
  • Title

    Suspended-gate MOSFET: bringing new MEMS functionality into solid-state MOS transistor

  • Author

    N. Abele;R. Fritschi;K. Boucart;F. Casset;P. Ancey;A.M. Ionescu

  • fYear
    2005
  • fDate
    6/27/1905 12:00:00 AM
  • Firstpage
    479
  • Lastpage
    481
  • Keywords
    "MOSFET circuits","Micromechanical devices","Solid state circuits","Switches","CMOS technology","Air gaps","Silicon","Microswitches","Gate leakage","Fabrication"
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 2005. IEDM Technical Digest. IEEE International
  • Print_ISBN
    0-7803-9268-X
  • Type

    conf

  • DOI
    10.1109/IEDM.2005.1609384
  • Filename
    1609384
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3621548