DocumentCode :
3621548
Title :
Suspended-gate MOSFET: bringing new MEMS functionality into solid-state MOS transistor
Author :
N. Abele;R. Fritschi;K. Boucart;F. Casset;P. Ancey;A.M. Ionescu
fYear :
2005
fDate :
6/27/1905 12:00:00 AM
Firstpage :
479
Lastpage :
481
Keywords :
"MOSFET circuits","Micromechanical devices","Solid state circuits","Switches","CMOS technology","Air gaps","Silicon","Microswitches","Gate leakage","Fabrication"
Publisher :
ieee
Conference_Titel :
Electron Devices Meeting, 2005. IEDM Technical Digest. IEEE International
Print_ISBN :
0-7803-9268-X
Type :
conf
DOI :
10.1109/IEDM.2005.1609384
Filename :
1609384
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3621548
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