DocumentCode :
3621566
Title :
CMOS devices advanced gate stacks
Author :
R. Lander;K. Kuhn
fYear :
2005
fDate :
6/27/1905 12:00:00 AM
Firstpage :
881
Lastpage :
881
Keywords :
"Hafnium oxide","Silicon germanium","Germanium silicon alloys","MOS devices","Process design","Tin","Electrodes","FinFETs","Threshold voltage","Voltage control"
Publisher :
ieee
Conference_Titel :
Electron Devices Meeting, 2005. IEDM Technical Digest. IEEE International
Print_ISBN :
0-7803-9268-X
Type :
conf
DOI :
10.1109/IEDM.2005.1609498
Filename :
1609498
Link To Document :
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