• DocumentCode
    3621654
  • Title

    Awards

  • fYear
    2005
  • fDate
    6/27/1905 12:00:00 AM
  • Abstract
    The 13th IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP 2005, Santa Barbara, CA Presents the Prof. J.F. Gibbons Award to Robert B. MacKnight (Mattson Technology, Inc.) in recognition of his contribution to RTP technology.
  • Keywords
    Awards
  • Publisher
    ieee
  • Conference_Titel
    Advanced Thermal Processing of Semiconductors, 2005. RTP 2005. 13th IEEE International Conference on
  • Print_ISBN
    0-7803-9223-X
  • Type

    conf

  • DOI
    10.1109/RTP.2005.1613677
  • Filename
    1613677
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3621654