DocumentCode :
3621654
Title :
Awards
fYear :
2005
fDate :
6/27/1905 12:00:00 AM
Abstract :
The 13th IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP 2005, Santa Barbara, CA Presents the Prof. J.F. Gibbons Award to Robert B. MacKnight (Mattson Technology, Inc.) in recognition of his contribution to RTP technology.
Keywords :
Awards
Publisher :
ieee
Conference_Titel :
Advanced Thermal Processing of Semiconductors, 2005. RTP 2005. 13th IEEE International Conference on
Print_ISBN :
0-7803-9223-X
Type :
conf
DOI :
10.1109/RTP.2005.1613677
Filename :
1613677
Link To Document :
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