Title :
Stick-slip based micropositioning stage for transmission electron microscope
Author :
O. Holub;M. Spiller;Z. Hurak
Author_Institution :
Dept. of Control Eng., Czech Tech. Univ., Prague
fDate :
6/28/1905 12:00:00 AM
Abstract :
This paper presents work that has been done on design of a micropositioning stage for a transmission electron microscope. Topics covered include mechanical design of the positioning stage, sawtooth-like high voltage generator, report on experimental identification of the system, some thoughts and experience with input command shaping, finite-element analysis and design of capacitive 2-axis position sensor and design of signal processing circuitry for this sensor
Keywords :
"Transmission electron microscopy","Signal design","Capacitive sensors","Mechanical sensors","Sensor systems","Voltage","Signal generators","Finite element methods","Signal analysis","Process design"
Conference_Titel :
Advanced Motion Control, 2006. 9th IEEE International Workshop on
Print_ISBN :
0-7803-9511-1
DOI :
10.1109/AMC.2006.1631707
