• DocumentCode
    3622723
  • Title

    Parylene BioMEMS

  • Author

    Yu-Chong Tai

  • fYear
    2005
  • fDate
    6/27/1905 12:00:00 AM
  • Firstpage
    26
  • Lastpage
    29
  • Keywords
    "Micromechanical devices","Biological materials","Plasma temperature","Sputter etching","Adhesives","Polymers","Chemical vapor deposition","Resists","Chemical technology","Tensile stress"
  • Publisher
    ieee
  • Conference_Titel
    Robotics and Biomimetics (ROBIO). 2005 IEEE International Conference on
  • Print_ISBN
    0-7803-9315-5
  • Type

    conf

  • DOI
    10.1109/ROBIO.2005.246395
  • Filename
    1708590
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3622723