Title :
Recent progress in acoustic imaging and microanalysis of new materials and devices by scanning acoustic microscopy
Author :
A. Doghmane;G. Despaux;Z. Hadjoub;L. Robert;R.J.M. da Fonseca
Author_Institution :
Lab. des Semicond., Annaba Univ., Algeria
fDate :
6/15/1905 12:00:00 AM
Abstract :
The authors describe acoustic characterisation techniques and then, in order to improve the quality of materials to detect defects or to determine elastic constants, we report some new qualitative and quantitative results obtained in many fields on different new materials: berlinite, heteropolysiloxanes and the structure of Si/Mo devices.
Keywords :
"Acoustic imaging","Acoustic microscopy","Semiconductor devices","Acoustic testing","Nondestructive testing"
Conference_Titel :
Acoustic Sensing and Imaging, 1993., International Conference on
Print_ISBN :
0-85296-575-3