Observation of Stationary Plasma Striation and Collimated Plasma Transport in a 100-kHz Inductively Coupled Plasma Discharge

Author

Takahashi, Koichi ; Ando, A.

Author_Institution

Dept. of Electr. Eng., Tohoku Univ., Sendai, Japan

Volume

42

Issue

10

fYear

2014

fDate

Oct. 2014

Firstpage

2784

Lastpage

2785

Abstract

Inductively coupled plasma source connected to a diffusion vacuum chamber is operated with an inverter-type radio frequency (RF) power supply in 10-Pa argon. Plasma structure in the glass source tube is preliminarily studied by acquisition of digital images. A RF antenna is powered with a frequency of ~100 kHz, which is adjusted in order to optimize impedance matching condition. Near the RF antenna, the plasma production over the glass source tube diameter is observed, whereas the smaller diameter plasma transport and the stationary plasma striation structure are seen between the RF antenna and diffusion chamber.

Keywords

antennas in plasma; argon; high-frequency discharges; impedance matching; plasma diagnostics; plasma sources; plasma transport processes; Ar; RF antenna; collimated plasma transport; diffusion vacuum chamber; digital image acquisition; frequency 100 kHz; glass source tube; impedance matching; inductively coupled plasma discharge source; inverter-type radiofrequency power supply; plasma production; plasma structure; pressure 10 Pa; stationary plasma striation; Antennas; Electron tubes; Glass; Inverters; Plasmas; Power supplies; Radio frequency; ICP plasma; inverter power supply; plasma striation; plasma striation.;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/TPS.2014.2308893

Filename

6767121