Title :
Preparation and Characterization of Microhotplate for Gas Sensors
Author :
A. Rehakova;D. Tengeri;I. Hotovy;T. Lalinsky;V. Rehacek;L. Spiess;H. Romanus;S. Hascik
Author_Institution :
Department of Microelectronics, Slovak University of Technology, Ilkovi?cova 3, 812 19 Bratislava, Slovakia. E-mail: andrea.rehakova@stuba.sk
Abstract :
In this work, we describe preparation and characterization of microhotplate for gas sensor structures. The microhotplate was prepared by DC magnetron sputtering using a TiN/Pt double layer. Measuring of electrical parameters demonstrated the structure to have linear I-V characteristic and resistance of 63Omega. The electrothermal characterization showed good linearity of the microhotplate at temperatures below 220degC. Temperature dependent measuring of different samples displayed influence of membrane thickness on self-heating process. According to these measurements, we could deduce some optimizations in design and fabrication process of the sensor structure
Keywords :
"Gas detectors","Electrical resistance measurement","Temperature sensors","Sputtering","Tin","Electric variables measurement","Electric resistance","Electrothermal effects","Linearity","Temperature dependence"
Conference_Titel :
Advanced Semiconductor Devices and Microsystems, 2006. ASDAM ´06. International Conference on
Print_ISBN :
1-4244-0369-0
DOI :
10.1109/ASDAM.2006.331208
